Quantum Noise Effects in e-Beam Lithography and Metrology

Title

Quantum Noise Effects in e-Beam Lithography and Metrology

Author

Verduin, T. (TU Delft ImPhys/Charged Particle Optics)

Contributor

Kruit, P. (promotor)
Hagen, C.W. (copromotor)

Degree granting institution

Delft University of Technology

Date

2017-01-18

To reference this document use:

https://doi.org/10.4233/uuid:f214f594-a21f-4318-9f29-9776d60ab06c

ISBN

978-94-6186-782-7

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

© 2017 T. Verduin