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Development of an Atomic Force Microscope


These file attachments have been under embargo and were made available to the public after the embargo was lifted on 14 July 2010.

Author: Obrebski, J.W.
Mentor: Spronck, J.W.
Faculty:Mechanical, Maritime and Materials Engineering
Department:Precision and Microsystems Engineering
Type:Master thesis
Embargo lifted:2010-07-14
Keywords: Atomic Force · Microscope
Rights: (c) 2010 Obrebski, J.W.


This abstract presents the development of an Atomic Force Microscope (AFM) vertical scanner for surface topography measurements, which is composed of a single axis positioning stage with an integrated metrology system and AFM probe. The scanner is meant to track and measure a maximum topography step of 10 μm with a measurement resolution of less then 0.1 nm and an uncertainty of less than 10 nm (1←) at a controllable bandwidth of at least 2 kHz.

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