Print Email Facebook Twitter Improved PECVD processed hydrogenated germanium films through temperature induced densification Title Improved PECVD processed hydrogenated germanium films through temperature induced densification Author de Vrijer, T. (TU Delft Photovoltaic Materials and Devices) van Dingen, Julian E.C. (Student TU Delft) Roelandschap, Paul J. (Student TU Delft) Roodenburg, Koos (Student TU Delft) Smets, A.H.M. (TU Delft Photovoltaic Materials and Devices) Date 2022 Abstract Amorphous and nano-crystalline germanium is of potential interest for a wide range of electronic, optical, opto-electronic and photovoltaic applications. In this work the influence of deposition temperature on hydrogenated germanium (Ge:H) films was characterized, using over 200 Ge:H and over 70 SiGe:H films. The demonstrated temperature-induced densification of Ge:H films resulted in more stable films with a lower bandgap energy and dark conductivity and higher activation energy. Subject Amorphous germaniumChemical stabilityHydrogenated germaniumPECVDTemperature densificationThin film To reference this document use: http://resolver.tudelft.nl/uuid:0379d9c9-3c15-4f1b-b51a-134cb8846726 DOI https://doi.org/10.1016/j.mssp.2021.106285 ISSN 1369-8001 Source Materials Science in Semiconductor Processing, 138, 1-7 Part of collection Institutional Repository Document type journal article Rights © 2022 T. de Vrijer, Julian E.C. van Dingen, Paul J. Roelandschap, Koos Roodenburg, A.H.M. Smets Files PDF 1_s2.0_S1369800121006193_main.pdf 1.79 MB Close viewer /islandora/object/uuid:0379d9c9-3c15-4f1b-b51a-134cb8846726/datastream/OBJ/view