Print Email Facebook Twitter Opto-electronic MEMS oscillator for resonant pressure sensing Title Opto-electronic MEMS oscillator for resonant pressure sensing Author Kumar, L. Contributor Sarro, P.M. (mentor) Steeneken, P.G. (mentor) Faculty Electrical Engineering, Mathematics and Computer Science Department Microelectronics & Computer Engineering Date 2014-07-18 Abstract This thesis details the design of a self-oscillating MEMS resonator as a pressure sensor. A bi-layer circular diaphragm with a single center perforation is used as a pressure sensitive membrane which measures the absolute pressure of the surrounding medium. A novel aspect of the proposed sensor is that the resonator is made to oscillate by an opto-electronic feedback loop. The membrane is driven electrostatically and it’s motion is sensed optically. The optical read-out system measures the velocity of the driven membrane which is subsequently converted into electrical signals for actuation. The proposed opto-electronic MEMS oscillator uses Laser Doppler Vibrometry for detection as well as signal conversion and amplification which to our knowledge has not been reported so far. Subject MEMSresonant sensorsLDVoscillator To reference this document use: http://resolver.tudelft.nl/uuid:04714233-c631-474a-81f7-ac1a36b4bdc8 Embargo date 2015-07-18 Part of collection Student theses Document type master thesis Rights (c) 2014 Kumar, L. Files PDF Thesis-Opto-Electronic_ME ... llator.pdf 14.14 MB Close viewer /islandora/object/uuid:04714233-c631-474a-81f7-ac1a36b4bdc8/datastream/OBJ/view