Nanoelectromechanical sensors based on suspended 2D materials

Nanoelectromechanical sensors based on suspended 2D materials

Lemme, Max C. (AMICA; RWTH Aachen University)
Wagner, Stefan (AMICA)
Lee, Kangho (University of the Federal Armed Forces Munich)
Fan, Xuge (KTH Royal Institute of Technology)
Verbiest, G.J. (TU Delft Dynamics of Micro and Nano Systems)
Wittmann, Sebastian (Infineon Technologies AG)
Lukas, Sebastian (RWTH Aachen University)
Dolleman, R.J. (RWTH Aachen University)
Niklaus, Frank (KTH Royal Institute of Technology)
van der Zant, H.S.J. (TU Delft QN/van der Zant Lab; Kavli institute of nanoscience Delft)
Duesberg, Georg S. (University of the Federal Armed Forces Munich)
Steeneken, P.G. (TU Delft Dynamics of Micro and Nano Systems; TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft)

2020

The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.

http://resolver.tudelft.nl/uuid:1848d127-8edd-42a3-9ea3-1069a609e597

https://doi.org/10.34133/2020/8748602

1340-2838

DNA Research, 2020

Institutional Repository

review

© 2020 Max C. Lemme, Stefan Wagner, Kangho Lee, Xuge Fan, G.J. Verbiest, Sebastian Wittmann, Sebastian Lukas, R.J. Dolleman, Frank Niklaus, H.S.J. van der Zant, Georg S. Duesberg, P.G. Steeneken