Print Email Facebook Twitter Ultra-sensitive graphene membranes for microphone applications Title Ultra-sensitive graphene membranes for microphone applications Author Baglioni, G. (TU Delft QN/van der Zant Lab; Kavli institute of nanoscience Delft) Pezone, R. (TU Delft Electronic Components, Technology and Materials) Vollebregt, S. (TU Delft Electronic Components, Technology and Materials) Cvetanović Zobenica, Katarina (University of Belgrade) Spasenović, Marko (University of Belgrade) Todorović, Dejan (Dirigent Acoustics Ltd) Liu, Hanqing (TU Delft Dynamics of Micro and Nano Systems) Verbiest, G.J. (TU Delft Dynamics of Micro and Nano Systems) van der Zant, H.S.J. (TU Delft QN/van der Zant Lab; Kavli institute of nanoscience Delft) Steeneken, P.G. (TU Delft Dynamics of Micro and Nano Systems; TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft) Date 2023 Abstract Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the acoustic response of suspended multilayer graphene membranes for microphone applications. We address performance parameters relevant for acoustic sensing, including mechanical sensitivity, limit of detection and nonlinear distortion, and discuss the trade-offs and limitations in the design of graphene microphones. We demonstrate superior mechanical sensitivities of the graphene membranes, reaching more than 2 orders of magnitude higher compliances than commercial MEMS devices, and report a limit of detection as low as 15 dBSPL, which is 10-15 dB lower than that featured by current MEMS microphones. To reference this document use: http://resolver.tudelft.nl/uuid:1ff8b871-b55d-433f-9fee-90fd0b63bd98 DOI https://doi.org/10.1039/d2nr05147h ISSN 2040-3364 Source Nanoscale, 15 (13), 6343-6352 Part of collection Institutional Repository Document type journal article Rights © 2023 G. Baglioni, R. Pezone, S. Vollebregt, Katarina Cvetanović Zobenica, Marko Spasenović, Dejan Todorović, Hanqing Liu, G.J. Verbiest, H.S.J. van der Zant, P.G. Steeneken Files PDF d2nr05147h.pdf 2.11 MB Close viewer /islandora/object/uuid:1ff8b871-b55d-433f-9fee-90fd0b63bd98/datastream/OBJ/view