Laser vapor-phase synthesis of submicron silicon and silicon nitride powders from chlorinated silanes

Title

Laser vapor-phase synthesis of submicron silicon and silicon nitride powders from chlorinated silanes

Author

Bauer, R.A.
Van der Put, P.J.
Becht, J.G.M.
Schoonman, J.

Date

1988

Subject

silicon nitride laser vapor synthesis silane reaction ammonia

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ISSN

0167-5001

Source

Klei/Glas/Keramiek 9(7), 178-181. (1988)

Part of collection

Institutional Repository

Document type

journal article