Characterization of thin film MEMS packages

Title

Characterization of thin film MEMS packages

Author

Li, Q.

Contributor

Van Keulen, A. (promotor)
Goosen, J.F.L. (promotor)

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Date

2012-12-03

To reference this document use:

https://doi.org/10.4233/uuid:27d2e586-08b3-4029-bc6a-d926b1580f70

Publisher

Delft University of Technology

ISBN

978-90-7717282-7

Part of collection

Institutional Repository

Document type

doctoral thesis

Rights

(c)2012 Li, Q.