Title
ZnO Nanoparticle Printing for UV Sensor Fabrication
Author
van Ginkel, H.J. (TU Delft Electronic Components, Technology and Materials)
Orvietani, M. (TU Delft Electronic Components, Technology and Materials)
Romijn, J. (TU Delft Microelectronics) 
Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials) 
Vollebregt, S. (TU Delft Electronic Components, Technology and Materials) 
Department
Microelectronics
Date
2022
Abstract
In this work, a novel microfabrication-compatible production process is demonstrated and used to fabricate UV photoresistors made from ZnO nanoparticles. It comprises a simple room-temperature production method for synthesizing and direct-writing nanoparticles. The method can be used on a wide range of surfaces and print a wide range of materials. Here, it is used to synthesize a ZnO photoresistor for the first time. The sensor shows a two orders of magnitude lower resistance under UV-C exposure compared to darkness. The low cost and simplicity of this synthesis method enables cheap integration of UV-C sensors for human exposure monitoring or UV-output monitoring of light sources.
Subject
UV sensor
nanoparticles
zinc oxide
spark ablation
printed electronics
To reference this document use:
http://resolver.tudelft.nl/uuid:330d509e-7988-49fd-90ad-9b1b2405d504
DOI
https://doi.org/10.1109/SENSORS52175.2022.9967053
Publisher
IEEE, Piscataway
Embargo date
2023-06-08
ISBN
978-1-6654-8465-7
Source
Proceedings of the 2022 IEEE Sensors
Event
2022 IEEE Sensors, 2022-10-30 → 2022-11-02, Dallas, United States
Series
Proceedings of IEEE Sensors, 1930-0395, 2022-October
Bibliographical note
Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Part of collection
Institutional Repository
Document type
conference paper
Rights
© 2022 H.J. van Ginkel, M. Orvietani, J. Romijn, Kouchi Zhang, S. Vollebregt