Electrostatic instability of micro-plates subjected to differential pressure: A semi-analytical approach

Sajadi, B.; Goosen, J.F.L.; van Keulen, A.

doi:10.1016/j.ijmecsci.2018.02.007

Electrostatic instability of micro-plates subjected to differential pressure

Title

Electrostatic instability of micro-plates subjected to differential pressure: A semi-analytical approach

Author

Sajadi, B. (TU Delft Computational Design and Mechanics; TU Delft Dynamics of Micro and Nano Systems)
Goosen, J.F.L. (TU Delft Computational Design and Mechanics)
van Keulen, A. (TU Delft Computational Design and Mechanics)

Date

2018

Abstract

Electrostatic instability is one of the main features of many electrostatic MEMS and NEMS devices. In this paper, we investigate how the electrostatic instability of a plate-like electrode can be affected by a differential pressure. The results of this study indicate that the presence of differential pressure can have a significant influence on the equilibrium path, the number and location of unstable points, and the post-instability behavior. As a result, while the system is loaded and unloaded electrically, the electrostatic instability might lead to a snapping behavior. The noticed snapping behavior of a flat plate makes it very appealing for sensing and actuating applications. This study is based on both a semi-analytical framework and finite element simulations. The proposed analytical solution is shown to be accurate enough to be used as an effective tool for design.

Subject

Bi-stability
Electrostatic instability
Micro-plate
Nonlocal elasticity
Pull-in
Snap-through

To reference this document use:

http://resolver.tudelft.nl/uuid:39a659ae-0d24-4f84-a1c2-1ca412496bd1

DOI

https://doi.org/10.1016/j.ijmecsci.2018.02.007

ISSN

0020-7403

Source

International Journal of Mechanical Sciences, 138-139, 210-218

Part of collection

Institutional Repository