Title
Electrothermal Filters for No-Trim Temperature Sensors
Author
Liu, Daguang (TU Delft Electrical Engineering, Mathematics and Computer Science)
Contributor
Pan, Sining (mentor)
Makinwa, Kofi (mentor)
Degree granting institution
Delft University of Technology
Programme
Electrical Engineering | Microelectronics
Date
2019-10-25
Abstract
This thesis describes the design and characterization of thermistor-based electrothermal filters (ETFs) intended for use in high-accuracy CMOS temperature sensors. ETFs have been previously realized by placing an on-chip heater in close proximity to an on-chip thermopile, which then picks up the thermally-delayed signals generated by the heater. This delay is a well-defined function of absolute temperature and can be used as the basis for highly accurate temperature sensors. In this work, the thermopiles are replaced by a thermistor, resulting in greater sensitivity and higher resolution. Measurements show that the new ETFs can achieve 3.6m℃ resolution in a conversion time of 1s and 0.2℃(3ó ó) untrimmed inaccuracy from 30℃ to 60℃.
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Embargo date
2025-01-01
Part of collection
Student theses
Document type
master thesis
Rights
© 2019 Daguang Liu