Print Email Facebook Twitter Shadow-wall lithography of ballistic superconductor–semiconductor quantum devices Title Shadow-wall lithography of ballistic superconductor–semiconductor quantum devices Author Heedt, S. (TU Delft BUS/Quantum Delft; TU Delft QuTech Advanced Research Centre; Kavli institute of nanoscience Delft; Microsoft Quantum Lab Delft) Quintero Perez, M. (TU Delft BUS/Quantum Delft; Microsoft Quantum Lab Delft) Borsoi, F. (TU Delft QCD/Veldhorst Lab; TU Delft QuTech Advanced Research Centre; Kavli institute of nanoscience Delft) van Loo, N. (TU Delft QRD/Kouwenhoven Lab; TU Delft QuTech Advanced Research Centre; Kavli institute of nanoscience Delft) Mazur, G.P. (TU Delft QRD/Kouwenhoven Lab; TU Delft QuTech Advanced Research Centre; Kavli institute of nanoscience Delft) Ammerlaan, M.L.I. (TU Delft ALG/General; TU Delft QuTech Advanced Research Centre; Kavli institute of nanoscience Delft) Li, K. (TU Delft BUS/Quantum Delft; TU Delft QuTech Advanced Research Centre; Kavli institute of nanoscience Delft) Korneychuk, S. (TU Delft QRD/Kouwenhoven Lab; TU Delft QuTech Advanced Research Centre; Kavli institute of nanoscience Delft) van de Poll, M.A.Y. (TU Delft QCD/Vandersypen Lab; TU Delft QuTech Advanced Research Centre; Kavli institute of nanoscience Delft) de Jong, N. (TU Delft BUS/TNO STAFF; TU Delft QuTech Advanced Research Centre; Kavli institute of nanoscience Delft; TNO) Aseev, P. (TU Delft BUS/Quantum Delft; Microsoft Quantum Lab Delft) van Hoogdalem, K.A. (TU Delft BUS/Quantum Delft; Microsoft Quantum Lab Delft) Kouwenhoven, Leo P. (TU Delft QN/Kouwenhoven Lab; TU Delft QuTech Advanced Research Centre; Kavli institute of nanoscience Delft; Microsoft Quantum Lab Delft) Date 2021 Abstract The realization of hybrid superconductor–semiconductor quantum devices, in particular a topological qubit, calls for advanced techniques to readily and reproducibly engineer induced superconductivity in semiconductor nanowires. Here, we introduce an on-chip fabrication paradigm based on shadow walls that offers substantial advances in device quality and reproducibility. It allows for the implementation of hybrid quantum devices and ultimately topological qubits while eliminating fabrication steps such as lithography and etching. This is critical to preserve the integrity and homogeneity of the fragile hybrid interfaces. The approach simplifies the reproducible fabrication of devices with a hard induced superconducting gap and ballistic normal-/superconductor junctions. Large gate-tunable supercurrents and high-order multiple Andreev reflections manifest the exceptional coherence of the resulting nanowire Josephson junctions. Our approach enables the realization of 3-terminal devices, where zero-bias conductance peaks emerge in a magnetic field concurrently at both boundaries of the one-dimensional hybrids. To reference this document use: http://resolver.tudelft.nl/uuid:5f80a91d-a821-48bc-b606-72df74651bfb DOI https://doi.org/10.1038/s41467-021-25100-w ISSN 2041-1723 Source Nature Communications, 12 (1) Part of collection Institutional Repository Document type journal article Rights © 2021 S. Heedt, M. Quintero Perez, F. Borsoi, N. van Loo, G.P. Mazur, M.L.I. Ammerlaan, K. Li, S. Korneychuk, M.A.Y. van de Poll, N. de Jong, P. Aseev, K.A. van Hoogdalem, Leo P. Kouwenhoven, More Authors Files PDF s41467_021_25100_w.pdf 1.67 MB Close viewer /islandora/object/uuid:5f80a91d-a821-48bc-b606-72df74651bfb/datastream/OBJ/view