Print Email Facebook Twitter Self-Sealing Complex Oxide Resonators Title Self-Sealing Complex Oxide Resonators Author Lee, M. (TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft) Robin, M.P. (TU Delft Dynamics of Micro and Nano Systems) Guis, R.H. (TU Delft Dynamics of Micro and Nano Systems) Filippozzi, U. (TU Delft QN/Caviglia Lab; Kavli institute of nanoscience Delft) Shin, D. (TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft) van Thiel, T.C. (TU Delft QN/Caviglia Lab; Kavli institute of nanoscience Delft) Paardekooper, Stijn P. (Student TU Delft) Renshof, Johannes R. (Kavli institute of nanoscience Delft; Student TU Delft) van der Zant, H.S.J. (TU Delft QN/van der Zant Lab; Kavli institute of nanoscience Delft) Caviglia, A. (TU Delft QN/Caviglia Lab; Kavli institute of nanoscience Delft) Verbiest, G.J. (TU Delft Dynamics of Micro and Nano Systems) Steeneken, P.G. (TU Delft Dynamics of Micro and Nano Systems; TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft) Date 2022 Abstract Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity beneath to be sealed by a simple anneal. To test the hermeticity, we study the gas permeation time constants in nanomechanical resonators made from SrRuO3 and SrTiO3 membranes suspended over SiO2/Si cavities which show an improvement up to 4 orders of magnitude in the permeation time constant after annealing the devices. Similar devices fabricated on Si3N4/Si do not show such improvements, suggesting that the adhesion increase over SiO2 is mediated by oxygen bonds that are formed at the SiO2/complex oxide interface during the self-sealing anneal. Picosecond ultrasonics measurements confirm the improvement in the adhesion by 70% after annealing. Subject Complex oxidesMembranesNanomechanicsNEMSPerovskitesPressure sensors To reference this document use: http://resolver.tudelft.nl/uuid:602cd46b-736a-4675-97a9-5500f5f948dd DOI https://doi.org/10.1021/acs.nanolett.1c03498 ISSN 1530-6984 Source Nano Letters: a journal dedicated to nanoscience and nanotechnology, 22 (4), 1475-1482 Part of collection Institutional Repository Document type journal article Rights © 2022 M. Lee, M.P. Robin, R.H. Guis, U. Filippozzi, D. Shin, T.C. van Thiel, Stijn P. Paardekooper, Johannes R. Renshof, H.S.J. van der Zant, A. Caviglia, G.J. Verbiest, P.G. Steeneken Files PDF acs.nanolett.1c03498.pdf 4.73 MB Close viewer /islandora/object/uuid:602cd46b-736a-4675-97a9-5500f5f948dd/datastream/OBJ/view