Print Email Facebook Twitter Compact Thermal-Diffusivity-Based Temperature Sensors in 40-nm CMOS for SoC Thermal Monitoring Title Compact Thermal-Diffusivity-Based Temperature Sensors in 40-nm CMOS for SoC Thermal Monitoring Author Sonmez, U. (TU Delft Electronic Instrumentation) Sebastiano, F. (TU Delft (OLD)Applied Quantum Architectures) Makinwa, K.A.A. (TU Delft Microelectronics) Department Microelectronics Date 2017 Abstract An array of temperature sensors based on the thermal diffusivity (TD) of bulk silicon has been realized in a standard 40-nm CMOS process. In each TD sensor, a highly digital voltage-controlled oscillator-based Σ Δ ADC digitizes the temperature-dependent phase shift of an electrothermal filter (ETF). A phase calibration scheme is used to cancel the ADC's phase offset. Two types of ETF were realized, one optimized for accuracy and one optimized for resolution. Sensors based on the accuracy-optimized ETF achieved a resolution of 0.36 °C (rms) at 1 kSa/s, and inaccuracies of ±1.4 °C (3 Σ , uncalibrated) and ±0.75 °C (3 Σ, room-temperature calibrated) from -40 °C to 125 °C. Sensors based on the resolution-optimized ETFs achieved an improved resolution of 0.21 °C (rms), and inaccuracies of ±2.3 °C (3 Σ, uncalibrated) and ±1.05 °C (3 Σ, room-temperature calibrated). The sensors draw 2.8 mA from supply voltages as low as 0.9 V, and occupy only 1650 μ m2 , making them some of the smallest smart temperature sensors reported to date, and well suited for thermal monitoring applications in systems-on-chip. Subject Phase-to-digital convertertemperature sensorsthermal diffusivity (TD)thermal monitoringvoltage-controlled oscillator (VCO)-based sigma-delta modulator To reference this document use: http://resolver.tudelft.nl/uuid:65bb199d-cb08-468d-b1c4-60692377e727 DOI https://doi.org/10.1109/JSSC.2016.2646798 ISSN 0018-9200 Source IEEE Journal of Solid State Circuits, 52 (3), 834-843 Bibliographical note Accepted Author Manuscript Part of collection Institutional Repository Document type journal article Rights © 2017 U. Sonmez, F. Sebastiano, K.A.A. Makinwa Files PDF 30558891_JSSC2646798.pdf 2.45 MB Close viewer /islandora/object/uuid:65bb199d-cb08-468d-b1c4-60692377e727/datastream/OBJ/view