Print Email Facebook Twitter The application of fractional order control for an air-based contactless actuation system Title The application of fractional order control for an air-based contactless actuation system Author Krijnen, Martijn (Student TU Delft) van Ostayen, R.A.J. (TU Delft Mechatronic Systems Design) Hassan HosseinNia, S. (TU Delft Mechatronic Systems Design) Date 2017 Abstract Industry pushes towards ever faster and more accurate production of thin substrates. Contactless positioning offers advantages, especially in terms of risk of breakage and contamination. A system is considered designed for contactless positioning by floating a silicon wafer on a thin film of air. This paper focuses on the design of a control system, including actuators, sensors and control method, suitable for this purpose. Two cascaded control loops, with decoupled SISO controllers, are implemented for this moving mass controlled on a mass-spring system, which can be modelled as a fourth order system. The SISO controllers are first designed with classic loopshaping tools, which are then modified using fractional control. Two arguments based on examples in this system are given for the application of fractional control. Firstly, to increase the bandwidth of a regular mass-spring system, and secondly to control a plant which behaves fundamentally fractional, such as the moving mass in this cascaded fourth ordersystem. By merely the application of fractionality, the bandwidths are extended by 14.6 % and 62 %, for the inner and outer loop respectively. A closed-loop positioning bandwidth of the wafer of 60 Hz is achieved, resulting in a positioning error of 104 nm (2s value), which is limited by sensor noise andpressure disturbances. This paper shows how the extension of classic loopshaping tools with fractional control can directly improve the performance, without adding to the complicatedness of the control system. Moreover it demonstrates a working concept of a novel type of contactless actuator. Subject Fractional order controlContactless actuation To reference this document use: http://resolver.tudelft.nl/uuid:65dd9c33-b270-4fca-b62a-3d6c3a55a308 DOI https://doi.org/10.1016/j.isatra.2017.04.014 Embargo date 2019-04-25 ISSN 0019-0578 Source ISA Transactions, 82 (2018), 172-183 Bibliographical note Accepted Author Manuscript Part of collection Institutional Repository Document type journal article Rights © 2017 Martijn Krijnen, R.A.J. van Ostayen, S. Hassan HosseinNia Files PDF Paper.pdf 3.64 MB Close viewer /islandora/object/uuid:65dd9c33-b270-4fca-b62a-3d6c3a55a308/datastream/OBJ/view