Print Email Facebook Twitter Characterization of low-loss hydrogenated amorphous silicon films for superconducting resonators Title Characterization of low-loss hydrogenated amorphous silicon films for superconducting resonators Author Buijtendorp, Bruno T. (Student TU Delft) Bueno, Juan (SRON Netherlands Institute for Space Research) Thoen, David (TU Delft Tera-Hertz Sensing) Murugesan, Vignesh (SRON Netherlands Institute for Space Research) Sberna, P.M. (TU Delft Electrical Engineering, Mathematics and Computer Science; TU Delft EKL Processing) Baselmans, J.J.A. (TU Delft Tera-Hertz Sensing; SRON Netherlands Institute for Space Research) Vollebregt, S. (TU Delft Electronic Components, Technology and Materials) Endo, A. (TU Delft Electrical Engineering, Mathematics and Computer Science; TU Delft Tera-Hertz Sensing) Faculty Electrical Engineering, Mathematics and Computer Science Date 2022 Abstract Superconducting circuit elements used in millimeter-submillimeter (mm-submm) astronomy would greatly benefit from deposited dielectrics with small dielectric loss and noise. This will enable the use of multilayer circuit elements and thereby increase the efficiency of mm-submm filters and allow for a miniaturization of microwave kinetic inductance detectors (MKIDs). Amorphous dielectrics introduce excess loss and noise compared with their crystalline counterparts, due to two-level system defects of unknown microscopic origin. We deposited hydrogenated amorphous silicon films using plasma-enhanced chemical vapor deposition, at substrate temperatures of 100°C, 250°C, and 350°C. The measured void volume fraction, hydrogen content, microstructure parameter, and bond-Angle disorder are negatively correlated with the substrate temperature. All three films have a loss tangent below 10-5 for a resonator energy of 105 photons, at 120 mK and 4 to 7 GHz. This makes these films promising for MKIDs and on-chip mm-submm filters. Subject amorphous silicondielectric lossfilter bankkinetic inductance detectorsmillimeter-submillimeterspectrometer To reference this document use: http://resolver.tudelft.nl/uuid:738ba6fc-be45-4b5a-83ba-81eedb9190e2 DOI https://doi.org/10.1117/1.JATIS.8.2.028006 ISSN 2329-4124 Source Journal of Astronomical Telescopes, Instruments, and Systems, 8 (2) Part of collection Institutional Repository Document type journal article Rights © 2022 Bruno T. Buijtendorp, Juan Bueno, David Thoen, Vignesh Murugesan, P.M. Sberna, J.J.A. Baselmans, S. Vollebregt, A. Endo Files PDF 028006_1.pdf 1.12 MB Close viewer /islandora/object/uuid:738ba6fc-be45-4b5a-83ba-81eedb9190e2/datastream/OBJ/view