The chemical-mechanical relationship of the SiOC(H) dielectric film

Title

The chemical-mechanical relationship of the SiOC(H) dielectric film

 Author

Yuan, C.
Van Der Sluis, O.
Zhang, G.Q.
Ernst, L.J.
Van Driel, W.D.
Van Silfhout, R.B.R.
Thijsse, B.J.

Faculty

Mechanical Maritime and Materials Engineering

 Date

2007

 To reference this document use:

http://resolver.tudelft.nl/uuid:76b2ee0d-7c39-4426-ad1c-7825965cb4e0

 Publisher

IEEE

 ISBN

1-4244-1106-8

 Source

proceedings of the International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems, London, April 15-18, 2007

 Part of collection

Institutional Repository

 Document type

conference paper

 Rights

(c) 2007 Yuan, C.; Van Der Sluis, O.; Zhang, G.Q.; Ernst, L.J.; Van Driel, W.D.; Van Silfhout, R.B.R.; Thijsse, B.J.
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