MEMS-based mechanical spectrum analyzer

Title

MEMS-based mechanical spectrum analyzer

Author

Rocha, L.A.
Cretu, E.
Wolffenbuttel, R.F.

Date

2005

To reference this document use:

http://resolver.tudelft.nl/uuid:95f9c7e6-12a7-4d86-beca-25da18c69bba

Publisher

IEEE

ISSN

0018-9456

Source

IEEE Transactions on Instrumentation and Measurement, 54 (3)

Part of collection

Institutional Repository

Document type

journal article

Rights

(c) 2005 Rocha, L.A.; Cretu, E.; Wolffenbuttel, R.F.