Piezo-Stepper actuator, Self-Sensing, Impedance Control

Piezo-Stepper actuator, Self-Sensing, Impedance Control

Naikwad, S.S.

Hassan Hosseinnia, S. (mentor)

Mechanical, Maritime and Materials Engineering

Precision & Microsystems Engineering (PME)

2016-08-04

Piezo-Stepper actuators also called as piezowalk actuators find widespread application in precision mechatronic systems. This is primarily because of their high accuracy, long range of motion and compact volume. One such application is in the optical column manipulator of a lithography system. During operation, whenever a motion is desired beyond the analog range of the actuator, a stepping motion is performed. A major performance limiting factor here is that during stepping, large disturbances and vibrations are induced in the manipulator due to hammering action of the clamp piezolegs. To reduce these errors, it is desired to regulate the interaction behaviour of the constitutive piezolegs of the actuator with the driving rod. In this research, the self sensing property of the piezoelectric element is exploited to detect contact and liftoff. Secondly, a self-sensing observer is designed to obtain force and position feedback signals to the controller. Finally using these signals as feedback, a modified impedance control scheme is designed to regulate the internal interaction behaviour between the piezolegs and the driving rod.

Piezo-Stepper actuator
Self-Sensing
Impedance Control

http://resolver.tudelft.nl/uuid:9610f971-45b3-4ac4-b1ff-70583123298a

Student theses

master thesis

(c) 2016 Naikwad, S.S.