Title
Passive film thickness control in hydrodynamic lubrication on non-flat surfaces
Author
Blommestein, Daniel (TU Delft Mechanical, Maritime and Materials Engineering)
Contributor
van Ostayen, R.A.J. (mentor) 
Snieder, J. (mentor)
Hassan HosseinNia, S. (graduation committee)
Degree granting institution
Delft University of Technology
Corporate name
Delft University of Technology
Programme
Mechanical Engineering | High-Tech Engineering
Date
2023-08-16
Abstract
Nanoimprinting is a manufacturing method to replicate micro- and nanotextures on large-area substrates with ultraviolet-curable resins. Significant potential of large-area nanopatterning lies in its capacity to greatly enhance the performance of an abundance of devices and foster the creation of cutting-edge products. However, current large-area imprinting techniques require improvement in order to achieve high resolution, high throughput and cost-effectiveness, whilst imprinting in a thin uniform resin layer. This work presents the development of a demonstrator to passively control the film thickness in hydrodynamic lubrication on non-flat surfaces in nanoimprinting lithography.
Using low stiffness actuation, it was expected that film thickness uniformity increases during imprinting. In this project a functioning demonstrator is realised, where the film height under a slider bearing is passively controlled. The slider bearing behaviour has been tested on various flat and non-flat surfaces. Film heights of 80-160 micrometer were realised on non-flat substrates of 800 micrometer.
Subject
Hydrodynamics
Bearing
Demonstrator
Reynolds equation
Stiffness
To reference this document use:
http://resolver.tudelft.nl/uuid:9c0a3e69-9b3e-4891-8f53-7b8a6098acd6
Embargo date
2024-08-16
Part of collection
Student theses
Document type
master thesis
Rights
© 2023 Daniel Blommestein