Print Email Facebook Twitter Automatic feature selection in EUV scatterometry Title Automatic feature selection in EUV scatterometry Author Ansuinelli, P. (TU Delft ImPhys/Optics) Coene, W.M.J.M. (TU Delft ImPhys/Optics) Urbach, Paul (TU Delft ImPhys/Optics) Date 2019 Abstract Scatterometry is an important nonimaging and noncontact method for optical metrology. In scatterometry certain parameters of interest are determined by solving an inverse problem. This is done by minimizing a cost functional that quantifies the discrepancy among measured data and model evaluation. Solving the inverse problem is mathematically challenging owing to the instability of the inversion and to the presence of several local minima that are caused by correlation among parameters. This is a relevant issue, particularly when the inverse problem to be solved requires the retrieval of a high number of parameters. In such cases, methods to reduce the complexity of the problem are to be sought. In this work, we propose an algorithm suitable to automatically determine which subset of the parameters is mostly relevant in the model, and we apply it to the reconstruction of 2D and 3D scatterers. We compare the results with local sensitivity analysis and with the screening method proposed by Morris. To reference this document use: http://resolver.tudelft.nl/uuid:b4865c8f-8bc3-4856-ad1a-4bd6340a7fd8 DOI https://doi.org/10.1364/AO.58.005916 ISSN 1559-128X Source Applied Optics, 58 (22), 5916-5923 Part of collection Institutional Repository Document type journal article Rights © 2019 P. Ansuinelli, W.M.J.M. Coene, Paul Urbach Files PDF ao_58_22_5916.pdf 1.06 MB Close viewer /islandora/object/uuid:b4865c8f-8bc3-4856-ad1a-4bd6340a7fd8/datastream/OBJ/view