Print Email Facebook Twitter Fully integrated MEMS TGA device for inspection of nano-masses Title Fully integrated MEMS TGA device for inspection of nano-masses Author Iervolino, E. Contributor Sarro, P.M. (promotor) Faculty Electrical Engineering, Mathematics and Computer Science Department ECTM Date 2012-05-02 Abstract TGA is employed to determine degradation temperatures, absorbed moisture content, level of inorganic and organic components in milligram amount of materials. When such amounts of sample material are too dangerous to handle or not available MEMS TGA devices are a valuable option. To realize a MEMS TGA device a number of challenges arise: the decoupling of the sample mass and temperature dependence of the resonance frequency of the device; the mass and the temperature calibration of the device. In this thesis, these issues are addressed and a new MEMS TGA device is presented. Subject thermal analysisresonator To reference this document use: http://resolver.tudelft.nl/uuid:ca0a204d-300a-4613-ada4-56f80407ca96 ISBN 9789462030312 Part of collection Institutional Repository Document type doctoral thesis Rights (c) 2012 Iervolino, E. Files PDF Thesis_EIervolino_Complete_.pdf 16.89 MB Close viewer /islandora/object/uuid:ca0a204d-300a-4613-ada4-56f80407ca96/datastream/OBJ/view