Title
Dual-Gate Fet-Based Charge Sensor Enhanced by In-Situ Electrode Decoration in a MEMS Organs-On-Chip Platform
Author
Aydogmus, H. (TU Delft Electronic Components, Technology and Materials)
van Ginkel, H.J. (TU Delft Electronic Components, Technology and Materials)
Galiti, Anna-Danai (Student TU Delft)
Hu, Michel (Leiden University Medical Center)
Frimat, Jean-Philippe (Leiden University Medical Center)
van den Maagdenberg, Arn (Leiden University Medical Center)
Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials) 
Mastrangeli, Massimo (TU Delft Electronic Components, Technology and Materials)
Sarro, Pasqualina M (TU Delft Electronic Components, Technology and Materials)
Date
2021
Abstract
Continuous monitoring of tissue microphysiology is a key enabling feature of the organ-on-chip (OoC) approach for drug screening and disease modeling. Sensing charged species in OoC tissue microenvironments is thereby essential. However, the inherently small (i.e., cm) size of OoC devices poses the challenging requirement to integrate miniaturized and highly sensitive in situ charge sensing components to maximize signal extraction from small volumes (nL to L, range) of media used in these devices. Here we meet this need by presenting a novel dual-gate field-effect transistor-based charge sensor integrated within an optically transparent microelectromechanical (MEM) OoC device. Post-process mask-less decoration of Ti sensing electrodes by spark-ablated Au nanoparticle films significantly increases the effective electrode surface area and thus sensor sensitivity while retaining the CMOS-compatibility of the wafer-level fabrication process. We validate the biocompatibility of the sensor and its selective response to poly-D-lsine and KC1, and provide a perspective on monitoring cultures and differentiation of hiPSC-derived cortical neurons on our OoC device.
Subject
Biosensor
charge sensing
electrodes
microfabrication
neurons
organ-on-chip
spark ablation
To reference this document use:
http://resolver.tudelft.nl/uuid:d30350b7-f9f8-4209-b732-a024e98aa906
DOI
https://doi.org/10.1109/Transducers50396.2021.9495393
Publisher
IEEE
Embargo date
2022-02-06
ISBN
978-1-6654-4845-1
Source
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Event
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2021-06-20 → 2021-06-24, Virtual at Orlando, United States
Series
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Bibliographical note
Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Part of collection
Institutional Repository
Document type
conference paper
Rights
© 2021 H. Aydogmus, H.J. van Ginkel, Anna-Danai Galiti, Michel Hu, Jean-Philippe Frimat, Arn van den Maagdenberg, Kouchi Zhang, Massimo Mastrangeli, Pasqualina M Sarro