Print Email Facebook Twitter From Silicon toward Silicon Carbide Smart Integrated Sensors Title From Silicon toward Silicon Carbide Smart Integrated Sensors Author Middelburg, L.M. (TU Delft Electronic Components, Technology and Materials) Contributor Zhang, Kouchi (promotor) Degree granting institution Delft University of Technology Date 2020-10-12 Subject harsh environmentsmart sensorssystem integrationwide-bandgap semiconductorssilicon carbideMEMSpressure sensorsparticle sensorssuspended membranesmicromachiningSiC CMOSmonolithic integration To reference this document use: https://doi.org/10.4233/uuid:d7e85d9b-9ef2-4d16-b9d7-2882a6177174 Embargo date 2021-09-29 Part of collection Institutional Repository Document type doctoral thesis Rights © 2020 L.M. Middelburg Files PDF PhD_diss_LM_Middelburg.pdf 243.28 MB Close viewer /islandora/object/uuid:d7e85d9b-9ef2-4d16-b9d7-2882a6177174/datastream/OBJ/view