Non-iterative method for phase retrieval and coherence characterization by focus variation using a fixed star-shaped mask

Title

Non-iterative method for phase retrieval and coherence characterization by focus variation using a fixed star-shaped mask

 Author

Konijnenberg, A.P. (TU Delft ImPhys/Optics)
Lu, Xingyuan (Soochow University)
Liu, Leixin (Soochow University)
Coene, W.M.J.M. (TU Delft ImPhys/Optics; ASML)
Zhao, C.L. (Soochow University)
Urbach, Paul (TU Delft ImPhys/Optics)

Date

2018

 Abstract

A novel non-iterative phase retrieval method is proposed and demonstrated with a
proof-of-principle experiment. The method uses a fixed specially designed mask and through-focus intensity measurements. It is demonstrated that this method is robust to spatial partial coherence in the illumination, making it suitable for coherent diffractive imaging using spatially partially coherent light, as well as for coherence characterization.

 Subject

OA-Fund TU Delft

 To reference this document use:

http://resolver.tudelft.nl/uuid:dd7a8a26-22cf-49e4-a184-7763af323651

 DOI

https://doi.org/10.1364/OE.26.009332

 ISSN

1094-4087

 Source

Optics Express, 26 (7), 9332 - 9343

 Part of collection

Institutional Repository

 Document type

journal article

 Rights

© 2018 A.P. Konijnenberg, Xingyuan Lu, Leixin Liu, W.M.J.M. Coene, C.L. Zhao, Paul Urbach
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