Device with foil corrector for electron optical aberrations at low energy

Title

Device with foil corrector for electron optical aberrations at low energy

 Author

Kruit, P.
Van Aken, R.H.

Faculty

Applied Sciences

 Date

2004-03-11

 Abstract

An electron optical device for, in use, creating negative spherical and chromatic aberration and reducing the energy spread in an electron beam travelling on an optical axis, including: at least one conducting plate substantially perpendicular to the optical axis with a first aperture having a first radius around said optical axis, a thin foil of conducting material located parallel to and at a first distance from the at least one conducting plate, In use, the thin foil has an electric potential that generates an electrical field for reducing the kinetic energy of electrons in the electron beam to a value substantially close to zero at the surface of the foil, while leaving the kinetic energy of the electrons in the first aperture at a relatively higher value.

 To reference this document use:

http://resolver.tudelft.nl/uuid:df6c4da5-1602-4cdb-a608-11243ce400d0

 Publisher

European Patent Office

 Source

WO 2004021391 (A1)

 Is part of

http://v3.espacenet.com/publicationDetails/biblio?CC=WO&NR=2004021391A1&KC=A1&FT=D&date=20040311&DB=&locale=en_EP

 Part of collection

Institutional Repository

 Document type

patent

 Rights

(c) 2004 Kruit, P.; Van Aken, R.H.
Files
PDF WO2004021391A1.pdf 1008.22 KB
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