Print Email Facebook Twitter Schnelle Rasterkraftmikroskopie durch moderne Regelungstechnik und mechatronische Systemintegration Title Schnelle Rasterkraftmikroskopie durch moderne Regelungstechnik und mechatronische Systemintegration Author Steininger, J. Kuiper, S. Schitter, G. Ito, S. Faculty Mechanical, Maritime and Materials Engineering Department Delft Center for Systems and Control Date 2012-01-01 Abstract In atomic force microscopy (AFM) high-performance and high precision control of the scanning-system is crucial. At high imaging speeds the dynamic behaviour of the scanner may cause imaging artefacts limiting the maximum imaging rate. This contribution discusses recent improvements for faster imaging by utilizing modern mechatronic and control engineering methods. Subject SPM, AFM, scanning probe, control, nanotechnology, nanometrology To reference this document use: http://resolver.tudelft.nl/uuid:e3dee049-4eb9-418e-992b-3c6f57dd6337 DOI https://doi.org/10.1007/s00502-012-0070-8 Publisher Springer-Verlag ISSN 1613-7620 Source http://link.springer.com/article/10.1007/s00502-012-0070-8 Source e & i Elektrotechniek und Informationstechnik, 129(1)2012 Part of collection Institutional Repository Document type journal article Rights (c)2012 The Authors and Springer Files PDF Steininger.pdf 997.89 KB Close viewer /islandora/object/uuid:e3dee049-4eb9-418e-992b-3c6f57dd6337/datastream/OBJ/view