Humidity sensor based on multi-layer graphene (MLG) integrated onto a micro-hotplate (MHP)

Humidity sensor based on multi-layer graphene (MLG) integrated onto a micro-hotplate (MHP)

Sacco, L.N. (TU Delft Electronic Components, Technology and Materials)
Meng, Hanxing (Student TU Delft)
Vollebregt, S. (TU Delft Electronic Components, Technology and Materials)

2022

This work demonstrates a humidity sensor based on two multi-layered graphene (MLG) strips monolithically integrated onto a micro-hotplate (MHP). A transfer-free approach was adopted to release the graphene from the catalyst to reduce device variations and ensure scalability. The sensing performance of the device was tested by exposing the device to humidity levels in the range of 10% to 84% of relative humidity (RH). Both MLG strips present a linear response over this range. The micro-heater implementation is vital to fully desorb water molecules from the MLG surface. The micro-heater was powered with 31 mW to reach 140°C in the MHP zone. The sensitivity of the devices is of the order of 1000 pp/RH[%]. The developed device aims at providing a robust and reliable gas sensors platform based on MLG.

Multi-layer graphene
microheater
humidity sensing
transfer-free graphene
gas sensors

http://resolver.tudelft.nl/uuid:efce2fb4-b831-4572-9d4d-d6f87cf5032b

https://doi.org/10.1109/SENSORS52175.2022.9967039

IEEE, Piscataway

2023-06-08

978-1-6654-8465-7

Proceedings of the 2022 IEEE Sensors

2022 IEEE Sensors, 2022-10-30 → 2022-11-02, Dallas, United States

Proceedings of IEEE Sensors, 1930-0395, 2022-October

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Institutional Repository

conference paper

© 2022 L.N. Sacco, Hanxing Meng, S. Vollebregt