Title
A highly miniturized single-chip MOEMS scanner for all-in-one imaging solution
Author
Jovic, A. (TU Delft EKL Processing)
Uto, T. (Kaneka Corporation)
Hei, K. (TU Delft ImPhys/Optics) 
Sancho, Juan (MedLumics)
Sanchez, Nuria (MedLumics)
Zinoviev, Kirill (IMEC-Solliance)
Rubio, Jose L. (MedLumics)
Margallo, Eduardo (MedLumics)
Pandraud, G. (TU Delft EKL Processing)
Sarro, Pasqualina M (TU Delft Electronic Components, Technology and Materials)
Date
2018
Abstract
A highly miniaturized, single-chip, large scanning range MOEMS scanner is demonstrated. This intrinsically-aligned, monolithically integrated device uses small angular displacement to provide a linear scanning range of 2000 μm in the lateral and 1000 μm in the vertical direction, at a working distance of 2 cm, with an average operating power lower than 170 mW. Within a footprint of only 7×10 mm2, the presented system fully integrates a photonic interferometer comprising a mirror, a silicon microlens and the MEMS actuator into a single chip, thus offering an unprecedentedly miniaturized scanning solution. The monolithic integration of all photonic components provides intrinsic alignment and excludes coupling losses often encountered in systems composed of discrete parts. No additional attenuation of the optical signal is observed during device operation. This small and high-performance device is suitable as complete system-on-chip for commercial, portable imaging applications.
Subject
Optical waveguides
Lenses
Optical interferometry
Silicon
Mirrors
Optical device fabrication
Optical imaging
To reference this document use:
http://resolver.tudelft.nl/uuid:f8ffad40-f660-4c7b-ab8f-2c927072032f
DOI
https://doi.org/10.1109/MEMSYS.2018.8346472
Publisher
IEEE, Piscataway, NJ
Embargo date
2021-08-02
ISBN
978-1-5386-4782-0
Source
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018, 2018-January
Event
MEMS 2018, 2018-01-21 → 2018-01-25, Belfast, United Kingdom
Bibliographical note
Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Part of collection
Institutional Repository
Document type
conference paper
Rights
© 2018 A. Jovic, T. Uto, K. Hei, Juan Sancho, Nuria Sanchez, Kirill Zinoviev, Jose L. Rubio, Eduardo Margallo, G. Pandraud, Pasqualina M Sarro