Print Email Facebook Twitter Thermally Driven Sound Source Title Thermally Driven Sound Source: Application of CNT nanofoams Author Yi, H. Contributor Poelma, R.H. (mentor) Zhang, G.Q. (mentor) Van Zeijl, H.W. (mentor) Faculty Mechanical, Maritime and Materials Engineering Department ECTM Programme Microelectronics Date 2015-10-26 Abstract On chip grown CNT nanofoam has a large surface to volume ratio and excellent thermal electrical properties, which is suitable to be used as a thermoacoustic heater. The highly porous foam exchanges heat with surrounding air efficiently. Every processing step is specifically designed to be CMOS compatible using cleanroom microfabrication. This design is expected to be a novel, robust, efficient TA device. All the advantages allow massive, parallel production, miniaturization and integration. Subject thermoacousticCNTnanofoammicro fabricationvertical3D To reference this document use: uuid:0b559d5b-66d1-4b61-a6c2-594307d55f31 Embargo date 2017-12-01 Part of collection Student theses Document type master thesis Rights (c) 2015 Yi, H.