Print Email Facebook Twitter Development of an Atomic Force Microscope Title Development of an Atomic Force Microscope Author Obrebski, J.W. Contributor Spronck, J.W. (mentor) Faculty Mechanical, Maritime and Materials Engineering Department Precision and Microsystems Engineering Date 2010-05-12 Abstract This abstract presents the development of an Atomic Force Microscope (AFM) vertical scanner for surface topography measurements, which is composed of a single axis positioning stage with an integrated metrology system and AFM probe. The scanner is meant to track and measure a maximum topography step of 10 ?m with a measurement resolution of less then 0.1 nm and an uncertainty of less than 10 nm (1←) at a controllable bandwidth of at least 2 kHz. Subject Atomic ForceMicroscope To reference this document use: http://resolver.tudelft.nl/uuid:3a2fd406-f917-4406-9d6e-02db018be498 Embargo date 2010-07-14 Part of collection Student theses Document type master thesis Rights (c) 2010 Obrebski, J.W. Files PDF ME_10_014_-_Obrebski_-_MS ... Report.pdf 7.65 MB PDF ME_10_014_-_Obrebski_-_MS ... tation.pdf 3.92 MB Close viewer /islandora/object/uuid:3a2fd406-f917-4406-9d6e-02db018be498/datastream/OBJ2/view