Piezoresistive Probe Array for High Throughput Applications

Journal article (2011)

Authors

A. Gaitas

P. French

Department

Microelectronics () (TU Delft)

DOI: https://doi.org/doi:10.1016/j.proeng.2011.12.357

Microcantilevers Atomic force microscope Scanning probe array Piezoresistive sensing Parallel imaging

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Published Date

04-09-2011

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Source:

Procedia Engineering, 25, 2011

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Abstract

Microcantilevers are used in a number of applications including atomic-force microscopy (AFM). In this work, piezoresistive deflection-sensing elements are integrated onto micromachined cantilevers to increase sensitivity, and reduce complexity and cost. An array of probes with 5 nm gold ultrathin film sensors on silicon substrates for high throughput scanning probe microscopy is developed. The gauge factor of the piezoresistive sensor is 3.16 ± 0.05 and the deflection sensitivity is 0.2 ppm/nm. Plots of the change in resistance of the sensing element with displacement are used to calibrate the probes and determine probe contact with the substrate. Topographical scans demonstrate high throughput and nanometer resolution.

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