Print Email Facebook Twitter Multiple patterning with process optimization method for maskless DMD-based grayscale lithography Title Multiple patterning with process optimization method for maskless DMD-based grayscale lithography Author Ma, X (Kyoto University) Kato, Y (Kyoto University) van Kempen, F.C.M. (TU Delft Computational Design and Mechanics) Hirai, Y (Kyoto University) Tsuchiya, T (Kyoto University) van Keulen, A. (TU Delft Computational Design and Mechanics) Tabata, O (Kyoto University) Contributor Urban, G. (editor) Wollenstein, J. (editor) Kieninger, J. (editor) Date 2015 Abstract We report a multiple patterning approach utilizing digital-micromirror-device (DMD)-based grayscale lithography, providing a solution to improve fabrication accuracy for entire target three-dimensional structure. Because DMD-based lithography system consists a projection lens system, better resolution can be obtained around focal position comparing to the outer region of depth of focus. Thus, for thick-film resist micro structuring, exposing with multiple focal positions with separate grayscale masks leads to improvement of fabrication accuracy. In order to find the best combination of the multiple focal positions and their grayscale masks, the computational optimization is combined to the multiple patterning approach. Through a several experiments, effectiveness of the proposed approach was successfully demonstrated. Subject Grayscale lithographySimulationOptimization3D microfabrication To reference this document use: http://resolver.tudelft.nl/uuid:78df4183-0847-4d97-a32b-0a6f2760296e DOI https://doi.org/10.1016/j.proeng.2015.08.778 Publisher Elsevier Source Procedia Engineering - Eurosensors 2015, 120 Event EUROSENSORS 2015, Freiburg, Germany, 2015-09-06 → 2015-09-09, Amsterdam Series Procedia Engineering, 1877-7058, 120 Part of collection Institutional Repository Document type conference paper Rights © 2015 X Ma, Y Kato, F.C.M. van Kempen, Y Hirai, T Tsuchiya, A. van Keulen, O Tabata Files PDF 1_s2.0_S1877705815024418_.pdf 1.05 MB Close viewer /islandora/object/uuid:78df4183-0847-4d97-a32b-0a6f2760296e/datastream/OBJ/view