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Harry, K.J. (author), Strobel, S.. (author), Yang, J.K.W. (author), Duan, H. (author), Berggren, K.K. (author)
In order to better characterize the development of the electron-beam resist hydrogen silsesquioxane (HSQ), the authors used a quartz crystal microbalance (QCM) to study its rate of dissolution in situ. The authors determined the effect of both salt concentration and applied electric potential on the development rate of HSQ. The development rates...
journal article 2011
document
Duan, X. (author), Jia, D. (author), Yang, Z. (author), Zhou, Y. (author), Ouyang, J. (author), Sloof, W.G. (author), Van der Zwaag, S. (author)
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conference paper 2013
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Rao, J. (author), Jia, D. (author), Duan, X. (author), Yang, Z. (author), Zhou, Y. (author), Ouyang, J. (author), Sloof, W.G. (author), Van der Zwaag, S. (author)
Abstract only.
conference paper 2013