Searched for: +
(1 - 1 of 1)
document
Harry, K.J. (author), Strobel, S.. (author), Yang, J.K.W. (author), Duan, H. (author), Berggren, K.K. (author)
In order to better characterize the development of the electron-beam resist hydrogen silsesquioxane (HSQ), the authors used a quartz crystal microbalance (QCM) to study its rate of dissolution in situ. The authors determined the effect of both salt concentration and applied electric potential on the development rate of HSQ. The development rates...
journal article 2011