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Kruit, P. (author), Hagen, C.W. (author), Mulder, E.H. (author)
The invention relates 'to a micro X-ray source comprising a target acting as anode, and a cathode, which during operation interacts with the target and functions as electron source, wherein the target is embodied as a metal foil possessing a spot where the electrons from the electron source arrive, the metal foil being locally thinner at the spot.
patent 2006