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Sudol, W. (author), Dirksen, P. (author), Henneken, V.A. (author), Dekker, R. (author), Louwerse, M.C. (author)
A large aperture CMUT transducer array is formed of a plurality of adjacently located tiles of CMUT cells. The adjacent edges of the tiles are formed by an anisotropic etch process, preferably a deep reactive ion etching process which is capable of cutting through the die and its substrate while maintaining vertical edges in close proximity to...
patent 2016