Introduction of Zener Diodes, JFETs and DMOSTs in a BiCMOS Process and Implementation of OTP Memory

In this research a feasibility study was performed on introducing Zener diodes, junction field-effect transistors (JFETs) and double-diffused MOS transistors (DMOSTs) in an existing silicon 0.25 μm BiCMOS process. As a restriction, no changes to the process were allowed. Lateral polysilicon Zener diodes were designed and optimized for low...