Compliant Remote-Center-of-Motion Mechanism Optimized for Energy-Dispersive Spectroscopy

In-situ sample holders with double-tilting capabilities are used to insert and position samples inside a transmission electron microscope for dynamic imaging. However, the performance of these sample holders, regarding energy-dispersive X-ray spectroscopy (EDS) analysis, is not on par with their single-tilt counterparts. By analyzing the EDS...