Searched for: +
(1 - 1 of 1)
document
He, X. (author)
Background Interferometers and capacitance sensors were used to measure the motion of the 6-DoF ferrofluid planar bearing positioning stage designed by Max Cafe who was the master student graduated in 2014. The sensor costs almost 30,000 euro to achieve nanometer scale accuracy. However, in some biology applications, such as observation of...
master thesis 2014