"uuid","repository link","title","author","contributor","publication year","abstract","subject topic","language","publication type","publisher","isbn","issn","patent","patent status","bibliographic note","access restriction","embargo date","faculty","department","research group","programme","project","coordinates" "uuid:47b78b3e-ddc6-4040-880c-a200ffcd2ec8","http://resolver.tudelft.nl/uuid:47b78b3e-ddc6-4040-880c-a200ffcd2ec8","Extremely small multimode interference couplers and ultrashort bends on InP by deep etching","Spiekman, L.H.; Oei, Y.S.; Metaal, E.G.; Green, F.H.; Moerman, I.; Smit, M.K.","","1994","","","en","journal article","IEEE","","","","","","","","","","","","",""