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Middelburg, L.M. (author), el Mansouri, B. (author), Poelma, R.H. (author), van Zeijl, H.W. (author), Wei, J. (author), Zhang, G.Q. (author), van Driel, W.D. (author)
The mechanical part of inertial sensors can be designed to have a large mechanical sensitivity, but also requires the transduction mechanism which translates this displacement. The overall system resolution in mechanical inertial sensors is dictated by the noise contribution of each stage and the magnitude of each sensitivity, see also Figure...
conference paper 2018