Searched for:
(1 - 1 of 1)
document
Mihailovic, M. (author)
This thesis explores the employment of monocrystalline silicon in microsystems as an active material for different thermal functions, such as heat generation and heat transfer by conduction. In chapter 1 applications that need thermal micro devices, micro heaters and micro heat exchangers, are briefly introduced. The shortcomings of commonly...
doctoral thesis 2011