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Laser Synthesis of Low-Agglomerated Submicrometer Silicon-Nitride Powders from Chlorinated Silanes
Laser Chemical Vapor Precipitation of Submicrometer Silicon and Silicon-Nitride Powders from Chlorinated Silanes
Laser Cvp of Ultrafine Ceramic Powders of Si and Si3n4 - a Study of the Flow Pattern of the Laser Flame
Laser vapor-phase synthesis of submicron silicon and silicon nitride powders from chlorinated silanes
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