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  • (-) = Creatore
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  • (-) = silicon
  • (-) = crystallisation

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  • journal article (1)

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  • elemental semiconductors (1)
  • plasma materials processing (1)

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2012 - 2013
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Solid-phase crystallization of ultra high growth rate amorphous silicon films
Solid-phase crystallization of ultra high growth rate amorphous silicon films
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