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Zhu, S.E. (author), Ghatkesar, M.K. (author), Zhang, C. (author), Janssen, G.C.A.M. (author)
We present a pressure sensor based on the piezoresistive effect of graphene. The sensor is a 100?nm thick, 280??m wide square silicon nitride membrane with graphene meander patterns located on the maximum strain area. The multilayer, polycrystalline graphene was obtained by chemical vapor deposition. Strain in graphene was generated by applying...
journal article 2013