document

Laser Chemical Vapor Precipitation of Submicrometer Silicon and Silicon-Nitride Powders from Chlorinated Silanes

Bauer, R.A. (author), Smulders, R. (author), Becht, J.G.M. (author), Van der Put, P.J. (author), Schoonman, J. (author)

journal article 1989

document

Laser vapor-phase synthesis of submicron silicon and silicon nitride powders from chlorinated silanes

Bauer, R.A. (author), Van der Put, P.J. (author), Becht, J.G.M. (author), Schoonman, J. (author)

journal article 1988