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Castaldo, V. (author), Hagen, C.W. (author), Rieger, B. (author), Kruit, P. (author)
In principle, a scanning ion microscope can produce smaller probe sizes than a scanning electron microscope because the diffraction contribution is smaller. However, the imaging resolution is often severely limited by the sputtering damage. In this article, an experimental procedure to establish the limit of a focused ion beam system for imaging...
journal article 2008