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Van Haver, S. (author), Braat, J.J.M. (author), Janssen, A.J.E.M. (author), Janssen, O.T.A. (author), Pereira, S.F. (author)
We present details of a novel imaging algorithm based on the extended Nijboer–Zernike (ENZ) theory of diffraction. We derive integral expressions relating the electric field distribution in the entrance pupil of an optical system to the electric field in its focal region. The evaluation of these integrals is made possible by means of a highly...
journal article 2009
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Van Haver, S. (author), Janssen, O.T.A. (author), Braat, J.J.M. (author), Janssen, A.J.E.M. (author), Urbach, H.P. (author), Pereira, S.F. (author)
In this paper we introduce a new mask imaging algorithm that is based on the source point integration method (or Abbe method). The method presented here distinguishes itself from existing methods by exploiting the through-focus imaging feature of the Extended Nijboer-Zernike (ENZ) theory of diffraction. An introduction to ENZ-theory and its...
conference paper 2008
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Janssen, O.T.A. (author), Van Haver, S. (author), Janssen, A.J.E.M. (author), Braat, J.J.M. (author), Urbach, H.P. (author), Pereira, S.F. (author)
Results are presented of mask imaging using the Extended Nijboer-Zernike (ENZ) theory of diffraction. We show that the efficiency of a mask imaging algorithm, derived from this theory, can be increased. By adjusting the basic Finite Difference Time Domain (FDTD) algorithm, we can calculate the near field of isolated mask structures efficiently,...
conference paper 2008
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Braat, J.J.M. (author), Dirksen, P. (author), Janssen, A.J.E.M. (author), Van Haver, S. (author), Van de Nes, A.S. (author)
The judgment of the imaging quality of an optical system can be carried out by examining its through-focus intensity distribution. It has been shown in a previous paper that a scalar-wave analysis of the imaging process according to the extended Nijboer–Zernike theory allows the retrieval of the complex pupil function of the imaging system,...
journal article 2005
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