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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)
TiO2 is an interesting and promising material for micro-/nanoelectromechanical systems (MEMS/NEMS). For high performance and reliable MEMS/NEMS, optimization of the optical characteristics, mechanical stress, and especially surface smoothness of TiO2 is required. To overcome the roughness issue of the TiO2 films due to crystallization during...
journal article 2012
document
Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)
We propose and experimentally demonstrate a reflectance-based photonic crystal (PC) liquid sensor. The PC is made of two-dimensional TiO2 nanopillar arrays. Such a reflectance-based structure with large functional area not only simplifies the optical guiding but also enhances the sensor signal. A linear shift of reflectance peaks is found for...
journal article 2012
document
Testa, G. (author), Huang, Y. (author), Zeni, L. (author), Sarro, P.M. (author), Bernini, R. (author)
In this work we review recent results of our work on optofluidics. We show that single mode optofluidic waveguides with low loss can be realized using antiresonant reflecting optical confinement (ARROW). These waveguides can be fabricated using full standard silicon technology or hybrid silicon-polymer processes. ARROW waveguides have been used...
conference paper 2012
document
Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)
A promising concept for a photonic crystal sensor for liquid sensing applications is introduced. The two dimensional photonic crystals are fabricated using a recently developed Atomic layer deposition ARrays Defined by Etch-back technique (AARDE) to obtain large functional surfaces and dense pillar arrays. Photonic signals are collected by means...
journal article 2011
document
Testa, G. (author), Huang, Y. (author), Zeni, L. (author), Sarro, P. (author), Bernini, R. (author)
We report the design and the fabrication of an integrated optofluidic ring resonator based on liquid core antiresonant reflecting optical waveguide (ARROW) operating around ?=635nm with a water filled core (nc=1.33). This waveguide permits a strong coupling between light and analyte as the same microchannel can be used for delivering sample and...
conference paper 2011
document
Testa, G. (author), Huang, Y. (author), Sarro, P.M. (author), Zeni, L. (author), Bernini, R. (author)
The feasibility of an integrated silicon optofluidic ring resonator is demonstrated. Liquid core antiresonant reflecting optical waveguides are used to realize a rectangular ring resonator with a multimode interference liquid core coupler between the ring and the bus waveguide. In this configuration the same waveguide used to confine the light...
journal article 2010
document
Testa, G. (author), Huang, Y. (author), Zeni, L. (author), Sarro, P.M. (author), Bernini, R. (author)
Integrated liquid core AntiResonant Reflecting Optical Waveguide (ARROW) are used as basic component for the realization of complex optofluidic devices. Liquid core ARROW waveguides permit to confine the light in a low refractive index liquid core, by means of two high refractive index cladding layers designed to form a high reflectivity Fabry...
conference paper 2010
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